The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Mar. 20, 2013
Applicant:
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v., Munich, DE;
Inventors:
Ulrich Hofmann, Itzehoe, DE;
Hans-Joachim Quenzer, Itzehoe, DE;
Joachim Janes, Itzehoe, DE;
Björn Jensen, Itzehoe, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 7/18 (2006.01); G02B 7/182 (2006.01); B32B 37/16 (2006.01); B32B 38/00 (2006.01); B32B 38/10 (2006.01); G02B 1/12 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0833 (2013.01); B32B 37/16 (2013.01); B32B 38/0008 (2013.01); B32B 38/10 (2013.01); G02B 1/12 (2013.01); G02B 7/1815 (2013.01); G02B 7/1821 (2013.01); B32B 2307/416 (2013.01); B32B 2310/0875 (2013.01); B32B 2551/08 (2013.01);
Abstract
A micromirror system that includes a chip frame, at least one spring element, and at least one mirror plate oscillatorily suspended in the chip frame via the at least one spring element. The chip frame and the at least one spring element include at least one microchannel which is provided with an inlet opening and an outlet opening for leading through a flowing coolant.