The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Sep. 10, 2013
Applicant:
Ams International Ag, Rapperswil-Jona, CH;
Inventors:
Aurelie Humbert, Brussels, BE;
Roel Daamen, Herkenbosch, NL;
Assignee:
AMS INTERNATIONAL AG, Rapperswil-Jona, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/08 (2006.01); G01N 27/04 (2006.01); G01N 27/02 (2006.01); G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 27/04 (2013.01); G01N 27/02 (2013.01); G01N 27/125 (2013.01);
Abstract
An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate. The integrated circuit also includes an electrical impedance based gas sensor located on the substrate. The sensor includes first and second electrically conductive sensor electrodes. Each sensor electrode is enclosed in an electrically conductive corrosion protection material. The sensor also includes a gas sensitive material located between the sensor electrodes. The impedance of the gas sensitive material is sensitive to a gas to be sensed.