The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Feb. 04, 2014
Applicant:
Heraeus Quarzglas Gmbh & Co. KG, Hanau, DE;
Inventors:
Assignee:
Heraeus Quarzglas GmbH & Co. KG, Hanau, DE;
Primary Examiner:
Int. Cl.
CPC ...
C03C 3/06 (2006.01); C03B 19/14 (2006.01); C03B 32/00 (2006.01); G02B 5/08 (2006.01); G03F 7/20 (2006.01); C03B 25/02 (2006.01);
U.S. Cl.
CPC ...
C03C 3/06 (2013.01); C03B 19/1453 (2013.01); C03B 19/1469 (2013.01); C03B 25/02 (2013.01); C03B 32/00 (2013.01); G02B 5/0891 (2013.01); G03F 7/70316 (2013.01); G03F 7/70958 (2013.01); C03B 2201/21 (2013.01); C03B 2201/23 (2013.01); C03B 2201/42 (2013.01); C03C 2201/21 (2013.01); C03C 2201/23 (2013.01); C03C 2201/42 (2013.01); C03C 2203/40 (2013.01); C03C 2203/52 (2013.01);
Abstract
A blank of TiO—SiOglass for a mirror substrate for use in EUV lithography has a low need for adaptation to optimize the progression of the coefficient of thermal expansion, and consequently also the progression of the zero crossing temperature T. The TiO—SiOglass has at a mean value of the fictive temperature Tin the range between 920° C. and 970° C. a dependence expressed as the differential quotient dT/dTof its zero crossing temperature Ton the fictive temperature Tof less than 0.3.