The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 13, 2016

Filed:

Feb. 26, 2014
Applicant:

Renesas Electronics Corporation, Kawasaki-shi, Kanagawa, JP;

Inventors:

Koichi Toba, Kanagawa, JP;

Hiraku Chakihara, Kanagawa, JP;

Yoshiyuki Kawashima, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/792 (2006.01); H01L 29/66 (2006.01); H01L 27/115 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 29/792 (2013.01); H01L 27/11565 (2013.01); H01L 27/11568 (2013.01); H01L 29/4234 (2013.01); H01L 29/66833 (2013.01);
Abstract

In an MONOS-type memory cell with a split gate structure, short circuit between a selection gate electrode and a memory gate electrode is prevented, and reliability of a semiconductor device is improved. In a MONOS memory having a selection gate electrode and a memory gate electrode that are adjacent to each other and that extend in a first direction, an upper surface of the selection gate electrode in a region except for a shunt portion at an end portion of the selection gate electrode in the first direction is covered with a cap insulating film. The memory gate electrode is terminated on the cap insulating film side with respect to a border between the cap insulating film and an upper surface of the shunt portion exposed from the cap insulating film.


Find Patent Forward Citations

Toba, Koichi. (2016). Semiconductor device and method of manufacturing the same (U.S. Patent No. 9520504). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9520504

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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