The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2016
Filed:
Jan. 31, 2014
Wafertech, Llc, Camas, WA (US);
WAFERTECH. LLC, Camas, WA (US);
Abstract
MIM capacitors that are temperature and/or voltage independent, and a methodology for formulating the MIM capacitors for use in semiconductor integrated circuits, is provided. Vertical MIM capacitive structures include at least two vertically separated electrodes and a capacitor dielectric that includes portions of different dielectric materials provided in a desired area ratio. The disclosure provided for selecting dielectrics and dielectric thicknesses, determining an area ratio that produces temperature and/or voltage independent MIM capacitors, and forming capacitive devices with the desired area ratio. In one embodiment, the capacitor dielectric includes at least one SiO dielectric portion and at least one SiN dielectric portion and a total capacitive area includes the SiN and SiO dielectric portions arranged such that the ratio of the area of the SiO portions to the area of the SiN portions is about 1.15:1.