The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 13, 2016

Filed:

Jan. 14, 2016
Applicant:

Renesas Electronics Corporation, Tokyo, JP;

Inventors:

Satoshi Eguchi, Tokyo, JP;

Yoshito Nakazawa, Tokyo, JP;

Assignee:

Renesas Electronics Corporation, Kawasaki-shi, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/761 (2006.01); H01L 21/265 (2006.01); H01L 29/66 (2006.01); H01L 21/04 (2006.01); H01L 29/16 (2006.01); H01L 29/861 (2006.01); H01L 29/78 (2006.01); H01L 29/165 (2006.01); H01L 29/06 (2006.01); H01L 29/739 (2006.01); H01L 29/10 (2006.01); H01L 29/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/761 (2013.01); H01L 21/0415 (2013.01); H01L 21/26506 (2013.01); H01L 21/26513 (2013.01); H01L 29/0634 (2013.01); H01L 29/16 (2013.01); H01L 29/165 (2013.01); H01L 29/1608 (2013.01); H01L 29/66068 (2013.01); H01L 29/7395 (2013.01); H01L 29/7811 (2013.01); H01L 29/861 (2013.01); H01L 29/0878 (2013.01); H01L 29/1095 (2013.01); H01L 29/66712 (2013.01);
Abstract

A method for manufacturing a semiconductor device including a cell region and a peripheral region formed outside the cell region, comprising the steps of (a) providing a semiconductor substrate including a first epitaxial layer of a first conductivity type formed over a main surface thereof, (b) doping a lower band gap impurity for making the band gap smaller than the band gap of the first epitaxial layer before doping into the first epitaxial layer in the cell region, and thereby forming a lower band gap region, (c) after the step (b), forming a plurality of first column regions of a second conductivity type which is the opposite conductivity type to the first conductivity type in such a manner as to be separated from one another in the first epitaxial layer extending from the cell region to the peripheral region, and (d) after the step (c), forming a second epitaxial layer.


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