The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2016
Filed:
Nov. 25, 2013
Applicant:
Ion Beam Services, Peynier, FR;
Inventors:
Frank Torregrosa, Simiane, FR;
Laurent Roux, Marseilles, FR;
Assignee:
ION BEAM SERVICES, Peynier, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/36 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32357 (2013.01); H01J 37/32412 (2013.01); H01J 2237/31701 (2013.01); H01J 2237/3365 (2013.01);
Abstract
The invention relates to an ion implanter that comprises an enclosure ENV having arranged therein a substrate carrier PPS connected to a substrate power supply ALT via a high voltage electrical passage PET, the enclosure ENV being provided with pump means PP, PS, the enclosure ENV also having at least two cylindrical source bodies CS, CSfree from any obstacle and arranged facing the substrate carrier. This implanter is remarkable in that it includes at least one confinement coil BCI-BCS, BCI-BCSper source body CS, CS