The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 13, 2016

Filed:

May. 02, 2013
Applicant:

Turbodynamics Gmbh, Riedering, DE;

Inventors:

Stefan Thurmaier, Au/Bad Feilnbach, DE;

Benno Stigloher, Kolbermoor, DE;

Assignee:

Turbodynamics GmbH, Riedering, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/20 (2006.01); G01R 31/28 (2006.01); G01R 31/26 (2014.01);
U.S. Cl.
CPC ...
G01R 31/2889 (2013.01); G01R 31/2601 (2013.01); G01R 31/2887 (2013.01);
Abstract

The invention relates to a module for exchanging an approximately planar interface unit in a testing system for testing semiconductor elements. The module includes a base element, a holder, and guide elements. The guide elements are embodied so that the interface unit can be moved by means of a linear, translatory movement from an end position into an intermediate position and from the intermediate position into a removal position that is situated outside the testing system. The mechanism includes a lever mechanism that is controlled by a sliding guide and is supported so that it can move crosswise to the linear translation movement of the holder.


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