The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2016
Filed:
Sep. 23, 2015
Applicant:
Olympus Corporation, Tokyo, JP;
Inventor:
Nobuaki Sakai, Hachioji, JP;
Assignee:
OLYMPUS CORPORATION, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01Q 10/00 (2010.01); G01Q 20/02 (2010.01); G01Q 10/04 (2010.01); G01Q 30/02 (2010.01);
U.S. Cl.
CPC ...
G01Q 10/00 (2013.01); G01Q 10/04 (2013.01); G01Q 20/02 (2013.01); G01Q 30/025 (2013.01);
Abstract
A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.