The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2016
Filed:
May. 13, 2014
Xiamen Tianma Micro-electronics Co., Ltd., Xiamen, CN;
Tianma Micro-electronics Co., Ltd., Shenzhen, CN;
XIAMEN TIANMA MICRO-ELECTRONICS CO., LTD., Xiamen, CN;
TIANMA MICRO-ELECTRONICS CO., LTD., Shenzhen, CN;
Abstract
Method, equipment and systems for measuring a radio frequency crosstalk are disclosed. The method includes: adjusting an impedance value of a matching network associated with a radio frequency electrode (including an anode and a cathode) in a plasma enhanced chemical vapor deposition (PECVD) system, and/or adjusting an impedance value of a radio frequency energy generating equipment associated with the radio frequency electrode, so that the sum of the impedance value of the matching network and the impedance value of the radio frequency electrode is the same as the impedance value of the radio frequency energy generating equipment; measuring an electrical signal received by the radio frequency electrode by the reversibility of energy transfer between the radio frequency electrode and the radio frequency energy generating equipment; and determining the energy of radio frequency crosstalk that the radio frequency electrode is subjected to according to the measured electrical signal.