The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Feb. 17, 2015
Applicant:
Silicium Energy, Inc., Menlo Park, CA (US);
Inventors:
Akram I. Boukai, San Francisco, CA (US);
Douglas W. Tham, Santa Clara, CA (US);
Adam Hopkins, San Francisco, CA (US);
Assignee:
SILICIUM ENERGY, INC., Menlo Park, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 35/34 (2006.01); H01L 35/32 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
H01L 35/34 (2013.01); H01L 35/32 (2013.01); B82Y 40/00 (2013.01);
Abstract
A vapor phase method for forming a thermoelectric element comprises providing a substrate in a reaction space, the substrate including a pattern of a metallic material adjacent to the substrate, which metallic material is configured to catalyze the oxidation of the substrate. The metallic material is then exposed to a gas having an oxidizing agent and a chemical etchant to form holes in or wires from the substrate.