The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Mar. 14, 2014
Applicant:
Samsung Electronics Co., Ltd., Suwon-Si, Gyeonggi-Do, KR;
Inventors:
Sung-joo Lee, Seoul, KR;
Young-jae Song, Seoul, KR;
Min Wang, Seoul, KR;
Sung-kyu Jang, Seoul, KR;
Jae-young Choi, Suwon-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/12 (2006.01); H01L 29/16 (2006.01); H01L 21/02 (2006.01); H01L 29/267 (2006.01); H01L 29/778 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1606 (2013.01); H01L 21/0262 (2013.01); H01L 21/02425 (2013.01); H01L 21/02458 (2013.01); H01L 21/02527 (2013.01); H01L 29/267 (2013.01); H01L 29/778 (2013.01); H01L 29/7781 (2013.01);
Abstract
A method of manufacturing a heterogeneous layered structure includes growing a hexagonal boron nitride sheet directly on a metal substrate in a chamber, increasing a temperature of the chamber to about 300° C. to about 1500° C., and forming a graphene sheet on the hexagonal boron nitride sheet by supplying a carbon source into the chamber while thermally treating the hexagonal boron nitride sheet at the increased temperature.