The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
May. 28, 2009
Applicants:
Chris Schneller, Tijeras, NM (US);
Scott Roberts, Albuquerque, NM (US);
Kathryn Whitaker, Albuquerque, NM (US);
Kevin Ferguson, Albuquerque, NM (US);
Stephen Islas, Albuquerque, NM (US);
Joe Moore, Austin, TX (US);
Jim Puissant, Albuquerque, NM (US);
Inventors:
Chris Schneller, Tijeras, NM (US);
Scott Roberts, Albuquerque, NM (US);
Kathryn Whitaker, Albuquerque, NM (US);
Kevin Ferguson, Albuquerque, NM (US);
Stephen Islas, Albuquerque, NM (US);
Joe Moore, Austin, TX (US);
Jim Puissant, Albuquerque, NM (US);
Assignee:
AIR PRODUCTS AND CHEMICALS, INC., Allentown, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 9/00 (2006.01); H01L 21/673 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67379 (2013.01); H01L 21/67028 (2013.01); H01L 21/67051 (2013.01);
Abstract
Wafer carrier washing and drying apparatus and method, especially useful for the semiconducting industry.