The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 06, 2016

Filed:

Oct. 09, 2013
Applicant:

Samsung Corning Precision Materials Co., Ltd., Gyeongsangbuk-do, KR;

Inventors:

SooHo Park, ChungCheongNam-Do, KR;

JongSe Park, ChungCheongNam-Do, KR;

Young Zo Yoo, ChungCheongNam-Do, KR;

Joo Young Lee, ChungCheongNam-Do, KR;

Seo Hyun Kim, ChungCheongNam-Do, KR;

Gun Sang Yoon, ChungCheongNam-Do, KR;

Myong Woon Kim, ChungCheongNam-Do, KR;

Hyung Soo Shin, ChungCheongNam-Do, KR;

Seung Ho Yoo, ChungCheongNam-Do, KR;

Sang Do Lee, ChungCheongNam-Do, KR;

Sang Ick Lee, ChungCheongNam-Do, KR;

Sang Jun Yim, ChungCheongNam-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01B 1/08 (2006.01); C03C 17/245 (2006.01); C23C 16/40 (2006.01); C23C 16/448 (2006.01); H01L 21/02 (2006.01); H01L 31/18 (2006.01); H01L 31/0224 (2006.01);
U.S. Cl.
CPC ...
H01B 1/08 (2013.01); C03C 17/245 (2013.01); C23C 16/407 (2013.01); C23C 16/448 (2013.01); H01L 21/0262 (2013.01); H01L 21/02554 (2013.01); H01L 31/022483 (2013.01); H01L 31/1884 (2013.01); C03C 2217/216 (2013.01); Y02E 10/50 (2013.01);
Abstract

A zinc oxide (ZnO) precursor and a method of depositing a ZnO-based thin film using the same, with which a high-quality and high-purity ZnO-based thin film can be deposited. The ZnO precursor includes a mixture solvent containing at least two organic solvents which are mixed and a source material comprising diethyl zinc or dimethyl zinc which is diluted in the mixture solvent.


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