The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Mar. 16, 2011
Franz Dieterich, Nussbaumen, CH;
Reza Abhari, Forch/ZH, CH;
Andrea Giovannini, Lugano/TI, CH;
Vipluv Aga, Zürich/ZH, CH;
Franz Dieterich, Nussbaumen, CH;
Reza Abhari, Forch/ZH, CH;
Andrea Giovannini, Lugano/TI, CH;
Vipluv Aga, Zürich/ZH, CH;
ETH Zürich, Zürich, CH;
Abstract
An optical collector () for collecting extreme ultraviolet radiation or EUV light generated at a central EUV production site comprises a reflective shell (). To cope with thermal loading of the collector and avoid deformations, the reflective shell () is mounted on a support structure (), such that a cooling channel () is established between the back side of the reflective shell () and the support structure (), the thickness of the reflective shell () is substantially reduced, such that the convective heat transfer between the back side of the reflective shell () and a cooling medium () flowing through the cooling channel () dominates the process of removing heat from the reflective shell () with respect to heat conduction, and a cooling circuit () is connected to the cooling channel (); to supply a cooling medium () to the cooling channel () with a controlled coolant pressure and/or mass flow.