The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Mar. 15, 2013
Institute of Electronics, Chinese Academy of Sciences, Beijing, CN;
Shanhong Xia, Beijing, CN;
Yu Wang, Beijing, CN;
Dongming Fang, Beijing, CN;
Chunrong Peng, Beijing, CN;
Institute of Electronics, Chinese Academy of Science, Beijing, CN;
Abstract
A rotary resonant three-dimensional electric field sensor is disclosed. The rotary resonant three-dimensional electric field sensor includes: a substrate (); an X-direction electric field measurement unit (), a Y-direction electric field measurement unit (), and a Z-direction electric field measurement unit (), set on the substrate (), each of which including: a sensing electrode () fixed on the substrate (), and a shielding electrode () vibrating relatively to the sensing electrode (); and at least one set of driving mechanical structures (), is configured to generate a driving force so as to cause the shielding electrode () to vibrate relatively to a corresponding sensing electrode (), and the vibration is transferred to the shielding is electrodes () of the other two electric field measurement units ().