The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Mar. 15, 2012
Applicants:
Shigeyoshi Horiike, Kyoto, JP;
Kei Shinada, Kyoto, JP;
Takahiro Nishimoto, Kyoto, JP;
Inventors:
Assignee:
SHIMADZU CORPORATION, Kyoto-shi, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/62 (2006.01); G01N 27/68 (2006.01); G01N 27/70 (2006.01); G01N 30/64 (2006.01);
U.S. Cl.
CPC ...
G01N 27/68 (2013.01); G01N 27/70 (2013.01); G01N 30/64 (2013.01); G01N 2030/647 (2013.01);
Abstract
An aging treatment is performed by using cleaning gas obtained by mixing inert gas, as an impurity, to plasma gas. Plasma generation by dielectric-barrier discharge is performed until a predetermined period of time has elapsed by applying high AC voltage to an electrode while supplying the cleaning gas to a dielectric tube from a gas inlet.