The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Jun. 11, 2014
Ams International Ag, Rapperswil-Jona, CH;
Martijn Goossens, Veldhoven, NL;
Willem Frederik Adrianus Besling, Eindhoven, NL;
Peter Gerard Steeneken, Valkenswaard, NL;
Casper van der Avoort, Waalre, NL;
Remco Henricus Wilhelmus Pijnenburg, Hoogeloon, NL;
AMS INTERNATIONAL AG, Rapperswil-Jona, CH;
Abstract
One example discloses a MEMS device, including: a cavity having an internal environment; a seal isolating the internal environment from an external environment outside the MEMS device; wherein the seal is susceptible to damage in response to a calibration unsealing energy; wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment; and a calibration circuit capable of measuring the internal environment before and after damage to the seal.