The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Apr. 24, 2012
Applicants:
Akira Watanabe, Miyagi, JP;
Eiichi Ohta, Kanagawa, JP;
Akira Shimofuku, Kanagawa, JP;
Inventors:
Assignees:
RICOH COMPANY, LTD., Tokyo, JP;
TOHOKU UNIVERSITY, Miyagi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 18/06 (2006.01); C23C 18/12 (2006.01); C23C 18/14 (2006.01);
U.S. Cl.
CPC ...
C23C 18/06 (2013.01); C23C 18/1216 (2013.01); C23C 18/1245 (2013.01); C23C 18/1254 (2013.01); C23C 18/14 (2013.01);
Abstract
A method of manufacturing a metal oxide film is disclosed. The method includes the steps of soaking a substrate on which the metal oxide film is formed in a precursor solution for forming the metal oxide film; and irradiating and scanning a light, the light being collected at an interface between the substrate and the precursor solution, wherein the light is transmitted through the precursor solution, and the metal oxide film is formed on the substrate.