The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Sep. 23, 2010
Robert Martinson, Palo Alto, CA (US);
Paul Shufflebotham, San Jose, CA (US);
Kevin Lynch, Santa Clara, CA (US);
Heinrich Von Bunau, San Jose, CA (US);
Deborah Sloan, San Ramon, CA (US);
Daniel R. Juliano, Santa Clara, CA (US);
Robert Martinson, Palo Alto, CA (US);
Paul Shufflebotham, San Jose, CA (US);
Kevin Lynch, Santa Clara, CA (US);
Heinrich von Bunau, San Jose, CA (US);
Deborah Sloan, San Ramon, CA (US);
Daniel R. Juliano, Santa Clara, CA (US);
BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO., LTD., Beijing, CN;
Abstract
A sputtering target assembly, including a cylindrical backing tube, a magnet assembly disposed within the backing tube, and a conduit disposed within the backing tube and adapted for transporting coolant. The conduit includes at least one first opening positioned for providing the coolant in a substantially circumferential direction from the conduit toward an inner surface of the backing tube into a gap volume between a front side of the magnet assembly and the inner surface of the backing tube.