The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 06, 2016

Filed:

Jul. 15, 2014
Applicant:

Commissariat a L'energie Atomique ET Aux Ene Alt, Paris, FR;

Inventors:

Xavier Baillin, Crolles, FR;

Bernard Diem, Echirolles, FR;

Jean-Philippe Polizzi, Grenoble, FR;

Andre Rouzaud, Seyssinet, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81B 7/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0058 (2013.01); B81B 7/0038 (2013.01); B81B 7/0077 (2013.01); B81C 1/00285 (2013.01); B81C 1/00301 (2013.01); B81C 1/00682 (2013.01); B81B 2201/0228 (2013.01); B81B 2207/096 (2013.01); B81C 2201/053 (2013.01); B81C 2203/0136 (2013.01); B81C 2203/0163 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/16225 (2013.01);
Abstract

A microdevice encapsulation structure arranged in at least one cavity formed between a substrate and a cap rigidly attached to the substrate is provided, the cap including one layer of a first material, one face of which forms an inner wall of the cavity, and mechanical reinforcement portions rigidly attached at least to and partly covering said face, having gas absorption and/or adsorption properties, in which the Young's modulus of a second material of the mechanical reinforcement portions is higher than that of the first material, wherein each of said portions includes at least one first layer of the second material, and at least one second layer of a third metallic getter material such that the first layer of the second material is arranged between the layer of the first material and the second layer of the third material and/or is covered by the second layer of the third material.


Find Patent Forward Citations

Loading…