The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 29, 2016

Filed:

Jun. 13, 2013
Applicant:

Newsouth Innovations Pty Limited, Sydney, New South Wales, AU;

Inventors:

Martin Green, Bronte, AU;

Xiaojing Hao, Matraville, AU;

Chao-Yang Tsao, New Taipei, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/028 (2006.01); H01L 31/18 (2006.01); C23C 14/06 (2006.01); C30B 23/02 (2006.01); C30B 29/08 (2006.01); H01L 21/02 (2006.01); H01L 31/0725 (2012.01); H01L 31/0735 (2012.01);
U.S. Cl.
CPC ...
H01L 31/1816 (2013.01); C23C 14/06 (2013.01); C30B 23/02 (2013.01); C30B 23/025 (2013.01); C30B 29/08 (2013.01); H01L 21/02381 (2013.01); H01L 21/02532 (2013.01); H01L 21/02631 (2013.01); H01L 21/02658 (2013.01); H01L 31/028 (2013.01); H01L 31/0725 (2013.01); H01L 31/0735 (2013.01); H01L 31/1852 (2013.01); Y02E 10/544 (2013.01);
Abstract

A method is presented for forming a Ge containing layer on a Si substrate. The method includes providing a crystalline Si substrate having a surface that has a crystallographic orientation, heating the Si substrate in a vacuum environment, exposing the Si substrate to a surfactant that is suitable for growth of the Ge containing layer on the crystalline Si using surfactant mediation, and thereafter growing the Ge containing layer on the surface of the heated Si substrate using a suitable sputtering technique. The conditions of the growth of the Ge containing layer are selected such that a thin Ge containing layer is formed on the surface of the Si substrate. The thin Ge containing layer has a surface that has crystallographic properties suitable for epitaxial growth of a layer of a further material on the surface of the thin Ge containing layer.


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