The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
Apr. 11, 2014
Applicant:
Global Foundries Us Inc., Grand Cayman Country, KY;
Inventor:
Ricardo Mikalo, Heideblick, DE;
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/20 (2006.01); H01L 21/66 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
H01L 22/34 (2013.01); G01R 31/2831 (2013.01); G01R 31/2867 (2013.01);
Abstract
A method of forming a group of probe pads or sets of probe pads and DUTs in a staggered pattern within a portion of a pad row and the resulting device are disclosed. Embodiments include forming a first group of probe pads or sets of probe pads and DUTs in a pad row on a wafer; and forming a second group of probe pads and DUTs in the pad row on the wafer, wherein the probe pads or sets of probe pads of the first group are staggered along the pad row, and each DUT of the first group is aligned with a probe pad perpendicular to the pad row.