The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 29, 2016

Filed:

Dec. 15, 2011
Applicants:

Katsuhiro Yamazoe, Ibara, JP;

Shinichi Imai, Ibara, JP;

Kosuke Sakata, Ibara, JP;

Yoshiki Nishijima, Ibara, JP;

Hiroaki Tsukimoto, Ibara, JP;

Kohsaku Saino, Ibara, JP;

Inventors:

Katsuhiro Yamazoe, Ibara, JP;

Shinichi Imai, Ibara, JP;

Kosuke Sakata, Ibara, JP;

Yoshiki Nishijima, Ibara, JP;

Hiroaki Tsukimoto, Ibara, JP;

Kohsaku Saino, Ibara, JP;

Assignee:

TAZMO CO., LTD., Okayama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/677 (2006.01); B25J 9/04 (2006.01); B25J 9/10 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); B25J 9/043 (2013.01); B25J 9/1065 (2013.01);
Abstract

An object is to transmit an operation of a first parallel link to a second parallel link through a plurality of rotatably supported arms, to prevent the second parallel link from meandering or rolling so that a wafer can be transported smoothly. Arms (to) of a transmission arm unit () are provided for transmitting an operation of a first parallel link () to a second parallel link (). An operation of the first parallel link () is transmitted to the second parallel link () so that an angle between an arm () and an arm () in the second parallel link() always coincides with an angle between an arm () and an arm () in the first parallel arm unit ().


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