The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
May. 30, 2012
Takaaki Nakano, Minato-ku, JP;
Takaaki Nakano, Minato-ku, JP;
SINFONIA TECHNOLOGY CO., LTD., Tokyo, JP;
Abstract
A purge apparatus for replacing a gas atmosphere in a purge object vessel by a purge gas through a port provided on a bottom face of the purge object vessel is disclosed. The purge apparatus includes a purge unit attached to a table that receives the purge object vessel, and a purge nozzle body including a port contacting portion provided on an upper side of the purge nozzle body and an attachment object portion provided on a lower side of the purge nozzle body. The purge unit has an attachment portion and the port contacting portion of the purge nozzle body is configured to contact the port of the purge object vessel. The attachment object portion of the purge nozzle body removably engages with the attachment portion of the purge unit so that the purge nozzle body is removably attached to the purge unit.