The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
Feb. 04, 2014
Globalfoundries Inc., Grand Cayman, KY;
Shawn A. Adderly, Essex Junction, VT (US);
Samantha D. DiStefano, Burlington, VT (US);
Jeffrey P. Gambino, Westford, VT (US);
Max G. Levy, Essex Junction, VT (US);
Max L. Lifson, S. Burlington, VT (US);
Jed H. Rankin, Richmond, VT (US);
Timothy D. Sullivan, Underhill, VT (US);
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
An apparatus and method for leak detection of coolant gas from a chuck. The apparatus includes a chuck having a top surface and configured to clamp a substrate to the top surface, the chuck having one or more recessed regions in the top surface, the recessed regions configured to allow a cooling gas to contact a backside of the substrate; a cooling gas inlet and a cooling gas outlet connected to the one or more recessed regions; a first measurement device connected to the cooling gas inlet and configured to measure a first amount of cooling gas entering the cooling gas inlet and a second measurement device connected to the cooling gas outlet and configured to measure a second amount of cooling gas exiting from the cooling gas outlet; and a controller configured to determine a difference between the first amount of cooling gas and the second amount of cooling gas.