The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
Mar. 04, 2013
Illinois Tool Works Inc., Glenview, IL (US);
Anthony Kehoe, Glenview, IL (US);
John Lull, Glenview, IL (US);
Bill Valentine, Glenview, IL (US);
Chris Ellec, Glenview, IL (US);
Berwin Banares, Glenview, IL (US);
Illinois Tool Works Inc., Glenview, IL (US);
Abstract
A mass flow controller includes a fluid inlet, a fluid outlet, and a conduit defining a flow path along which the fluid flows through the mass flow controller. The mass flow controller includes an inlet block having an inlet aperture, an inlet channel fluidly coupled to the conduit, and one or more restrictors positioned along the flow path between the inlet aperture and inlet channel to minimize flow perturbations when a rate of decay measurement is taken or when flow the amount of pressure supplied to the valve inlet is otherwise interrupted.