The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
Sep. 27, 2013
Koninklijke Philips N.v., Eindhoven, NL;
Anne Johannes Wilhelmus Van Lievenoogen, Eindhoven, NL;
Frank Bernhard Sperling, Nuenen, NL;
KONINKLIJKE PHILIPS N.V., Eindhoven, NL;
Abstract
The present invention relates to a positioning device, e.g. for use as a wafer stage, having a very stable temperature, a very low power consumption and a uniform temperature distribution. A long stroke stage () and a short stroke stage () are stacked upon each other. To initiate a movement of the long stroke stage () and the short stroke stage () in a desired movement direction (M) the long stroke stage () is first moved in an opposite direction (M) that is opposite to the desired movement direction (M) and/or the short stroke stage () is first moved in the desired movement direction (M) for a predetermined time interval and for a distance smaller than the distance (d) between a ferromagnetic center stroke element () and the closest one of two actuators () in a stationary state of the long stroke stage (). Subsequently, the long stroke stage () is moved in the desired movement direction (M).