The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
Mar. 08, 2013
Applicant:
Epcos Ag, Munich, DE;
Inventors:
Michael Schiffer, Berlin, DE;
Andreas Peschka, Michendorf, DE;
Jörg Zapf, Munich, DE;
Karl Weidner, Munich, DE;
Harry Hedler, Germering, DE;
Assignee:
EPCOS AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01D 11/24 (2006.01); G01L 19/14 (2006.01); B81B 7/00 (2006.01); B23K 1/00 (2006.01); G01P 1/02 (2006.01);
U.S. Cl.
CPC ...
G01L 19/14 (2013.01); B23K 1/0008 (2013.01); B23K 1/0016 (2013.01); B81B 7/007 (2013.01); G01D 11/245 (2013.01); G01L 19/147 (2013.01); G01L 19/148 (2013.01); G01P 1/023 (2013.01); B81B 2207/092 (2013.01); B81B 2207/096 (2013.01);
Abstract
A micromechanical measuring element includes a carrier and a sensitive element connected to the carrier by a first solder connection and a second solder connection. The sensitive element is contacted electrically by the first solder connection. The sensitive element, the carrier and the second solder connection form a first chamber. The first chamber has a first opening.