The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
Mar. 15, 2013
Freescale Semiconductor, Inc., Austin, TX (US);
Andrew C. McNeil, Chandler, AZ (US);
Yizhen Lin, Cohoes, NY (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A microelectromechanical systems (MEMS) device includes at least two rate sensors () suspended above a substrate (), and configured to oscillate parallel to a surface () of the substrate (). Drive elements () in communication with at least one of the rate sensors () provide a drive signal () exhibiting a drive frequency. One or more coupling spring structures () interconnect the rate sensors (). The coupling spring structures enable oscillation of the rate sensors () in a drive direction dictated by the coupling spring structures. The drive direction for the rate sensors () is a rotational drive direction () associated with a first axis (), and the drive direction for the rate sensors () is a translational drive direction () associated with a second axis () that is perpendicular to the first axis ().