The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2016

Filed:

Oct. 07, 2013
Applicant:

Btu International, Inc., No. Billerica, MA (US);

Inventor:

Ramesh D. Peelamedu, Andover, MA (US);

Assignee:

BTU International, Inc., North Billerica, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 6/64 (2006.01); H05B 6/78 (2006.01);
U.S. Cl.
CPC ...
H05B 6/6482 (2013.01); H05B 6/645 (2013.01); H05B 6/6491 (2013.01); H05B 6/78 (2013.01);
Abstract

A furnace system for thermal processing of products and materials is disclosed which is particularly useful in processing touch screens for computer tablets and silicon wafers employed in fabricating solar cells. The system employs a hybrid of microwave and radiant heating of workpieces to provide controlled heating of the workpieces. A plurality of susceptors are disposed a furnace chamber. A plurality of microwave sources are arranged to provide microwave radiation in the chamber to uniformly heat workpieces in the chamber and to provide uniform heating of the susceptors. The susceptors are effective upon microwave heating by the microwave sources to provide uniform radiant heating of the workpieces in the chamber.


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