The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2016
Filed:
Apr. 21, 2015
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Stuart M. Jacobsen, Frisco, TX (US);
Brian Goodlin, Plano, TX (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/17 (2006.01); H01L 41/08 (2006.01); H01L 41/047 (2006.01); H03B 28/00 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01);
U.S. Cl.
CPC ...
H03H 9/175 (2013.01); H01L 41/047 (2013.01); H01L 41/0805 (2013.01); H03B 28/00 (2013.01); H03H 9/02055 (2013.01); H03B 2200/0022 (2013.01); H03H 9/131 (2013.01);
Abstract
A bulk acoustic wave (BAW) resonator includes a substrate having a top side surface and a bottom side surface. A Bragg mirror is on the top side surface of the substrate. A bottom electrode layer is on the Bragg mirror, and a piezoelectric layer is on the bottom electrode layer. A top dielectric layer is on the piezoelectric layer, and a top electrode layer is on the top dielectric layer. The bottom side surface of the substrate has a surface roughness of at least 1 μm root mean square (RMS).