The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2016

Filed:

Feb. 09, 2015
Applicant:

Samsung Electro-mechanics Co., Ltd., Suwon-si, KR;

Inventors:

Kyu Hyun Mo, Suwon-si, KR;

Dong Soo Seo, Suwon-si, KR;

Chang Su Jang, Suwon-si, KR;

Jae Hoon Park, Suwon-si, KR;

In Hyuk Song, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/06 (2006.01); H01L 29/78 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0634 (2013.01); H01L 29/42356 (2013.01); H01L 29/7827 (2013.01);
Abstract

A power semiconductor device may include a first conductivity type semiconductor substrate, a super-junction portion disposed on the first conductivity type semiconductor substrate and including a first conductivity type pillar and a second conductivity type pillar arranged in an alternating manner, and a three-dimensional (3D) gate portion disposed on the first conductivity type pillar. The 3D gate portion is disposed on the first conductivity type pillar to reduce the widths of the first and second conductivity type pillars, thereby effectively reducing a device size.


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