The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2016
Filed:
Nov. 20, 2014
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Abbas Ali, Plano, TX (US);
Eric Beach, Tucson, AZ (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 49/02 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 21/7681 (2013.01); H01L 21/76834 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 23/5228 (2013.01); H01L 23/53295 (2013.01); H01L 28/24 (2013.01); H01L 23/5329 (2013.01); H01L 23/53223 (2013.01); H01L 2924/0002 (2013.01);
Abstract
An integrated circuit with a metal thin film resistor with an overlying etch stop layer. A process for forming a metal thin film resistor in an integrated circuit with the addition of one lithography step.