The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2016
Filed:
Oct. 12, 2012
Applicant:
Tanaka Kikinzoku Kogyo K.k., Tokyo, JP;
Inventors:
Takanobu Miyashita, Tsukuba, JP;
Yasuyuki Goto, Tsukuba, JP;
Assignee:
TANAKA KIKINZOKU KOGYO K.K., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01J 37/34 (2006.01); B22F 3/00 (2006.01); C22C 1/04 (2006.01); C22C 1/05 (2006.01); C22C 5/04 (2006.01); C22C 19/07 (2006.01); C22C 27/06 (2006.01); G11B 5/851 (2006.01); B22F 3/14 (2006.01); H01F 41/18 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3429 (2013.01); B22F 3/00 (2013.01); B22F 3/14 (2013.01); C22C 1/04 (2013.01); C22C 1/0433 (2013.01); C22C 1/05 (2013.01); C22C 5/04 (2013.01); C22C 19/07 (2013.01); C22C 27/06 (2013.01); C23C 14/3414 (2013.01); G11B 5/851 (2013.01); H01F 41/183 (2013.01); H01J 37/3426 (2013.01);
Abstract
Provided is a magnetron sputtering target having a ferromagnetic metal element. This magnetron sputtering target includes: a magnetic phase containing the ferromagnetic metal element; a plurality of non-magnetic phases that each contain the ferromagnetic metal element and that are different in constituent elements or a content ratio of constituent elements; and an oxide phase. At least one of the plurality of non-magnetic phases is more finely interdispersed with the oxide phase than the magnetic phase.