The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2016
Filed:
Nov. 12, 2013
Boe Technology Group Co., Ltd., Beijing, CN;
Can Wang, Beijing, CN;
Jianwei Yu, Beijing, CN;
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Abstract
An exposure apparatus comprises a light source () and a diffusing sheet () provided below the light source (), a side of the diffusing sheet () adjacent to the light source () is an incident face () and the other side opposite to the incident face () is an emitting face (); the light emitted from the light source () enters the diffusing sheet () through the incident face (), is refracted within the diffusing sheet (), and after being diffused, emits out evenly throughout the emitting face (). The exposure apparatus enables an evenly exposure of the photoresist on the substrate. An exposure method using such an exposure apparatus is also disclosed.