The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2016
Filed:
Oct. 06, 2014
Applicant:
Micronas Gmbh, Freiburg, DE;
Inventors:
Christoph Wilbertz, Gundelfingen, DE;
Dominik Zimmermann, Freiburg, DE;
Assignee:
Micronas GmbH, Freiburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/403 (2006.01); G01N 27/414 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4143 (2013.01); G01N 27/4146 (2013.01); Y10T 428/24802 (2015.01); Y10T 428/24926 (2015.01);
Abstract
A layer system having a layer region, whereby the layer region has a single-crystal silicon substrate with a front side and a back side, and whereby a textured surface is formed on the front side and the textured surface has a topography with different heights and a thin film layer of a metal oxide and/or an oxide ceramic is formed on the textured surface, whereby the thin film layer covers the textured surface only partially.