The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2016
Filed:
Jun. 26, 2014
Applicant:
Zeon Corporation, Chiyoda-ku, Tokyo, JP;
Inventor:
Akiyoshi Shibuya, Tokyo, JP;
Assignee:
ZEON CORPORATION, Chiyoda-ku, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/26 (2006.01); C23C 16/44 (2006.01); C01B 31/02 (2006.01); B82Y 40/00 (2011.01); B82Y 30/00 (2011.01); C23C 16/54 (2006.01); C23C 16/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4405 (2013.01); C01B 31/0233 (2013.01); C23C 16/26 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C23C 16/0272 (2013.01); C23C 16/54 (2013.01); Y10S 977/742 (2013.01); Y10S 977/843 (2013.01);
Abstract
The disclosed method of manufacturing carbon nanotubes includes the steps of growing CNTs on a substrateand cleaning the inside of a growth furnaceby supplying a cleaning gas that contains water into the growth furnace. In the cleaning step, the cleaning is performed such that 0.7≦(2[CO]+[CO])/[H]≦1.3 is satisfied, where [H], [CO], and [CO] denote the concentrations of hydrogen, carbon dioxide, and carbon monoxide, respectively, in a gas within the growth furnace