The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2016
Filed:
Oct. 29, 2014
Applicant:
Taiyo Yuden Co., Ltd., Tokyo, JP;
Inventors:
Assignee:
TAIYO YUDEN CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/70 (2006.01); H03H 9/54 (2006.01); H03H 9/15 (2006.01); H03H 9/17 (2006.01); H03H 9/02 (2006.01); H03H 9/58 (2006.01); H01P 5/02 (2006.01); H01P 7/08 (2006.01); H01P 11/00 (2006.01);
U.S. Cl.
CPC ...
H03H 9/706 (2013.01); H03H 9/02015 (2013.01); H03H 9/02118 (2013.01); H03H 9/173 (2013.01); H03H 9/175 (2013.01); H03H 9/587 (2013.01); H03H 9/589 (2013.01); H01P 5/028 (2013.01); H01P 7/082 (2013.01); H01P 11/008 (2013.01);
Abstract
A piezoelectric thin-film resonator includes, a substrate, a piezoelectric film provided on the substrate, and a lower electrode and an upper electrode that face each other through the piezoelectric film. The piezoelectric film has an air space that is provided in at least part of an outer circumferential part of a resonance region in which the upper and lower electrodes face each other through the piezoelectric film and is not provided in a central part of the resonance region.