The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2016
Filed:
Mar. 18, 2013
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/05 (2006.01); H01L 41/08 (2006.01); H03H 9/02 (2006.01); H03H 9/17 (2006.01); H03H 9/19 (2006.01); H03H 9/10 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0825 (2013.01); H03H 9/02023 (2013.01); H03H 9/02157 (2013.01); H03H 9/177 (2013.01); H03H 9/19 (2013.01); H03H 9/0519 (2013.01); H03H 9/0542 (2013.01); H03H 9/0552 (2013.01); H03H 9/1021 (2013.01);
Abstract
When a size from a main surface of an outer edge to a step of a first stage of a vibration section is Md1, a size from the step of the first stage to a step of a second stage is Md2, a density of materials of the substrate is d, a density of materials of the excitation electrode is d, and a thickness of the excitation electrode on a main surface of a mesa of the second stage is t, a relationship of ((Md2+(d/d)×t))/Md1≦1.4 is satisfied.