The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2016
Filed:
Jul. 08, 2013
Nitto Denko Corporation, Ibaraki-shi, Osaka, JP;
Noriyuki Juni, Ibaraki, JP;
NITTO DENKO CORPORATION, Ibaraki-shi, JP;
Abstract
A manufacturing method for a micromirror array includes: preparing transparent flat substrates; attaching each of the substrates at a predetermined position of a machining stage of a dicing machine; sequentially forming parallel linear grooves arranged at intervals in one surface of each substrate; and stacking the substrates together so that the directions in which the linear grooves of the respective substrates extend are orthogonal to each other as seen in plan view. The substrates are stacked together in a manner selected from the group consisting of: the front surface of one of the substrates and the back surface of the other substrate are joined together for the stacking of the substrates; the front surfaces of the respective substrates are joined together for the stacking of the substrates; and the back surfaces of the respective substrates are joined together for the stacking of the substrates.