The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2016
Filed:
Sep. 14, 2012
Seung Eon Moon, Daejeon, KR;
Nak Jin Choi, Daejeon, KR;
Hyung Kun Lee, Daejeon, KR;
Jae Woo Lee, Daejeon, KR;
Woo Seok Yang, Daejeon, KR;
Jong Dae Kim, Daejeon, KR;
Seung Eon Moon, Daejeon, KR;
Nak Jin Choi, Daejeon, KR;
Hyung Kun Lee, Daejeon, KR;
Jae Woo Lee, Daejeon, KR;
Woo Seok Yang, Daejeon, KR;
Jong Dae Kim, Daejeon, KR;
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon, KR;
Abstract
Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.