The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2016
Filed:
Jul. 25, 2014
Sharp Kabushiki Kaisha, Osaka-shi, JP;
Shinichi Kawato, Osaka, JP;
Satoshi Inoue, Osaka, JP;
Takashi Ochi, Osaka, JP;
Yuhki Kobayashi, Osaka, JP;
Katsuhiro Kikuchi, Osaka, JP;
Eiichi Matsumoto, Mitsuke, JP;
Masahiro Ichihara, Mitsuke, JP;
Sharp Kabushiki Kaisha, Osaka-shi, JP;
Abstract
The present invention provides a vapor deposition apparatus capable of preventing abnormal film formation due to scattering in vapor deposition streams; and a method for producing an organic electroluminescent element which includes forming a patterned thin film with the vapor deposition apparatus. The present invention relates to a vapor deposition apparatus that includes a vapor deposition source equipped with a nozzle that ejects vapor deposition particles; an integrated limiting plate equipped with a first limiting plate including an opening that is in front of the nozzle, and with second limiting plates placed in the opening in the first limiting plate; and a mask including slits. The present invention also relates to a method for producing electroluminescent elements that includes a vapor deposition step of forming a patterned thin film with the vapor deposition apparatus.