The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2016
Filed:
Feb. 11, 2013
Applicant:
Honeywell International Inc., Morristown, CA (US);
Inventors:
Jennifer S. Strabley, Maple Grove, MN (US);
Karl D. Nelson, Plymouth, MN (US);
Robert Compton, Plymouth, MN (US);
Assignee:
Honeywell International Inc., Morris Plains, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 1/00 (2006.01); C23C 14/26 (2006.01); C22B 26/10 (2006.01); C23C 14/16 (2006.01); G04F 5/14 (2006.01);
U.S. Cl.
CPC ...
H05B 1/00 (2013.01); C22B 26/10 (2013.01); C23C 14/16 (2013.01); G04F 5/14 (2013.01);
Abstract
Embodiments described herein provide for an on-chip alkali dispenser. The on-chip alkali dispenser includes a monolithic semiconductor substrate defining a trench therein, and an evaporable metal material disposed in the trench. A heating element is disposed proximate the evaporable metal material and configured to provide heat to the evaporable metal material. A getter material is disposed to sorb unwanted materials released from the evaporable metal material.