The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 08, 2016

Filed:

Jun. 01, 2015
Applicant:

Blackberry Limited, Waterloo, CA;

Inventors:

Marina Zelner, Burlington, CA;

Susan Nagy, Burlington, CA;

Andrew Vladimir Claude Cervin, Oakville, CA;

James DiLorenzo, Windham, NH (US);

Assignee:

BLACKBERRY LIMITED, Waterloo, Ontario, CA;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 49/02 (2006.01); H01L 21/288 (2006.01); H01L 21/285 (2006.01); H01L 29/49 (2006.01); H01L 27/12 (2006.01); H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
H01L 28/60 (2013.01); H01L 21/285 (2013.01); H01L 21/288 (2013.01); H01L 21/2022 (2013.01); H01L 27/1281 (2013.01); H01L 29/4925 (2013.01); H01L 2224/4051 (2013.01); H01L 2224/4851 (2013.01);
Abstract

High-throughput deposition of a voltage-tunable dielectric material onto a substrate comprising a conductive electrode is provided. Respective gradients in at least two grain size defining parameters of the deposition are simultaneously provided, the respective gradients occurring for a first time period thereby producing a smoothly changing columnar crystalline habit of the voltage-tunable dielectric material. When the first time period has ended, the deposition continues for a second time period where the grain size defining parameters are held constant. In particular, the smoothly changing columnar crystalline habit of the voltage-tunable dielectric material is intentionally distorted by simultaneously providing the respective gradients in the in at least two grain size defining parameters of the deposition.


Find Patent Forward Citations

Loading…