The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 08, 2016

Filed:

Jun. 02, 2014
Applicant:

Zena Technologies, Inc., Cambridge, MA (US);

Inventors:

Young-June Yu, Cranbury, NJ (US);

Munib Wober, Topsfield, MA (US);

Assignee:

ZENA TECHNOLOGIES, INC., Cambridge, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/15 (2006.01); H01L 27/146 (2006.01); H01L 31/0232 (2014.01); H01L 31/0352 (2006.01); H01L 31/101 (2006.01); H01L 31/102 (2006.01); H01L 31/112 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14612 (2013.01); H01L 27/1461 (2013.01); H01L 27/14625 (2013.01); H01L 27/14645 (2013.01); H01L 31/0232 (2013.01); H01L 31/02327 (2013.01); H01L 31/0352 (2013.01); H01L 31/03529 (2013.01); H01L 31/035227 (2013.01); H01L 31/101 (2013.01); H01L 31/102 (2013.01); H01L 31/1126 (2013.01); H01L 27/14643 (2013.01); Y02E 10/50 (2013.01);
Abstract

An imaging device formed as an active pixel array combining a CMOS fabrication process and a nanowire fabrication process. The pixels in the array may include a single or multiple photogates surrounding the nanowire. The photogates control the potential profile in the nanowire, allowing accumulation of photo-generated charges in the nanowire and transfer of the charges for signal readout. Each pixel may include a readout circuit which may include a reset transistor, charge transfer switch transistor, source follower amplifier, and pixel select transistor. A nanowire is generally structured as a vertical rod on the bulk semiconductor substrate to receive light energy impinging onto the tip of the nanowire. The nanowire may be configured to function as either a photodetector or a waveguide configured to guild the light to the substrate. Light of different wavelengths can be detected using the imaging device.


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