The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 08, 2016

Filed:

Jan. 16, 2013
Applicant:

Fairchild Semiconductor Corporation, San Jose, CA (US);

Inventors:

Jonathan Adam Kleks, Sunnyvale, CA (US);

Ion Opris, San Jose, CA (US);

Justin Seng, San Jose, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/3187 (2006.01); G01P 15/125 (2006.01); G01P 21/00 (2006.01); G01R 27/26 (2006.01); B81B 7/00 (2006.01); H01L 21/00 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01R 31/3187 (2013.01); B81B 7/008 (2013.01); G01P 15/125 (2013.01); G01P 21/00 (2013.01); G01R 27/2605 (2013.01); B81B 2201/0235 (2013.01); G01P 2015/0868 (2013.01); G06F 2101/00 (2013.01); H01L 21/00 (2013.01); H01L 2223/00 (2013.01);
Abstract

An apparatus comprises a micro-electromechanical system (MEMS) sensor including a first capacitive element and a second capacitive element and an integrated circuit (IC). The IC includes a switch network circuit and a capacitance measurement circuit. The switch network circuit is configured to electrically decouple the first capacitive element of the MEMS sensor from a first input of the IC and electrically couple the second capacitive element to a second input of the IC. The capacitance measurement circuit can be configured to measure capacitance of the second capacitive element of the MEMS sensor during application of a first electrical signal to the decoupled first capacitive element.


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