Active vibration isolation and damping system

Abstract

An active vibration isolation and damping system () comprising a payload () that has to be isolated or damped, a vibration sensor () for detecting a vibration of the payload, an actuator () for moving the payload relative to a bearing body () supporting the payload, and a controller () for providing the actuator with a signal that is representative for the vibration. The system provides a solution for the tilting problem by applying a vibration sensor that has a low stiffness connection to the payload () for rotation along an axis () perpendicular to the gravitational force (), and a high stiffness connection to the payload () for the vibration detectable with the vibration sensor.