The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2016
Filed:
Nov. 10, 2014
Applicant:
L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;
Inventors:
Satoko Gatineau, Tsuchiura, JP;
Jean-Marc Girard, Versailles, FR;
Nicolas Blasco, Grenoble, FR;
Mikiko Kimura, Tsukuba, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/06 (2006.01); C23C 16/14 (2006.01); C23C 16/455 (2006.01); C23C 16/50 (2006.01); C23C 16/56 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45525 (2013.01); C23C 16/06 (2013.01); C23C 16/50 (2013.01); C23C 16/56 (2013.01);
Abstract
Vapor deposition methods of cobalt-containing films by using cobalt carbonyl nitrosyl are disclosed.