The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 01, 2016

Filed:

Jul. 02, 2014
Applicant:

Panasonic Corporation, Osaka, JP;

Inventors:

Yoshiaki Tanaka, Nara, JP;

Kazuya Hashimoto, Osaka, JP;

Takakiyo Harigai, Osaka, JP;

Hideaki Adachi, Osaka, JP;

Eiji Fujii, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); B32B 9/00 (2006.01); G01C 19/56 (2012.01); G01P 3/02 (2006.01); H01L 41/113 (2006.01); C23C 14/08 (2006.01); H01L 41/09 (2006.01); G01C 19/5607 (2012.01);
U.S. Cl.
CPC ...
G01P 9/04 (2013.01); C23C 14/088 (2013.01); H01L 41/0926 (2013.01); H01L 41/1873 (2013.01); H01L 41/1878 (2013.01); G01C 19/5607 (2013.01);
Abstract

The present invention provides an NBT-BT film having a higher polarization-disappearance temperature. The present invention is a [(Na,Bi)Ba]TiOcrystal piezoelectric film. The [(Na,Bi)Ba]TiOcrystal piezoelectric film has a (001) orientation only. The [(Na,Bi)Ba]TiOcrystal piezoelectric film has a-axis length of not less than 0.390 nanometers and not more than 0.395 nanometers. The [(Na,Bi)Ba]TiOcrystal piezoelectric film has c-axis length of not less than 0.399 nanometers and not more than 0.423 nanometers (where x represents a value of not less than 0 and not more than 1). The [(Na,Bi)Ba]TiOcrystal piezoelectric film has a polarization-disappearance temperature of not less than 389 degrees Celsius.


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